Buckling of polysilicon microbeams during sacrificial layer removal
نویسندگان
چکیده
منابع مشابه
Analysis of polysilicon micro beams buckling with temperature-dependent properties
The suspended electrothermal polysilicon micro beams generate displacements and forces by thermal buckling effects. In the previous electro-thermal and thermo-elastic models of suspended polysilicon micro beams, the thermo-mechanical properties of polysilicon have been considered constant over a wide rang of temperature (20900°C). In reality, the thermo-mechanical properties of polysilicon depe...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 1998
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/8/3/011